You are probably going to have to cut up some 1/8" thick veneer plywood material into 20" segments (20x20, 20x40, 20x80, etc) to fix it.
https://www.homedepot.com/p/1-8-in-x...7562/204727075
Going to have a lot of time getting intimate with a 6' to 8' long level, playing puzzle pieces, etc.
Might be able to use a 8' level to figure out exactly how much shimming on each tile.
Then cover the grid of corrective veneer pieces with some softish underlayment material to even things out (the minor irregularities between tiles).
Its good you have rubber on the bottom on your platform structure.
Or get a commerical gym membership for a year.